Lam Valve Repair / Lam Cylinder Repair/ Lam Parts Repair Serice
提供優良真空相關維修和保養方案處理,精準評估受損狀況任何可能損壞因素,取得最適當、高效率、低成本。我們針對各廠牌真空閥開發測試治具及軟體開發,並為各種真空閥件建立標準的維修作業程序及品管系統,保證客戶讓真空閥件能夠在最佳狀態下正常運作並回復效能。 ■ 真空環境可維修應用於基本製程 光阻去除(PR remove) 圖形PATTERN |
790-101-092-002 Lam Clamp Cylinder Bellows
LAM 796-003146 MKS HIGH VACUUM PNEUMATIC VALVE
AMAT 0190-76185 MKS L2-40-SP1-316 VALVE TWO STAGE INLINE(Applied Materials)
LAM 796-029684-321 LAM FUJIKIN PNEMATIC VALVE
LAM RESEARCH 853-083795-045 REV B SMC LLA5B-03-T19-X3A
LAM 853-083795-045VAT Vacuum Pendulum Control Valve 650487
Lam Paddle Lifter
853-032776-605Lam Pneumatic Slit Valve Assembly
853-012350-002Lam Lift Pin Bellow
790-022848-014Lam Peek
Lam RF PIN
Lam Research Metal Bellows
790-073306-109Lam Research Gate Assemblies
Lam INNER GATE VALVE DRIVE ASSY
Lam Pneumatic Slit Valve Assembly
Lam Slit Valve Bellows-02
Lam Slit Valve Bellows-03
Lam Cylinder Bellows-04
Lam Lift Pin Cylinder Bellows -05
Lam Lift Pin Bellows
Lam 調壓
Lam exhaust Piping
LAM Parts 客製1
LAM Parts 客製2
LAM Parts 客製3
LAM Parts客製4