AMAT (CVD&PVD)
提供優良真空相關維修和保養方案處理,精準評估受損狀況任何可能損壞因素,取得最適當、高效率、低成本。我們針對各廠牌真空閥開發測試治具及軟體開發,並為各種真空閥件建立標準的維修作業程序及品管系統,保證客戶讓真空閥件能夠在最佳狀態下正常運作並回復效能。 ■ 真空環境可維修應用於基本製程 光阻去除(PR remove) 圖形PATTERN |
VAT Rectangular Cortar Valve 02112-BA24
VAT Rectangular Cortar Valve 02112-BA24
SMC Gate Valve XGT200
300mm SLIT Valve
VAT 12136-PA44-AIX1 Vacuum Gate Valve
HVA162010 GATE VALVE
HVA 11110-0603 Manual valve
HVA SPGV6-MISO
MKS Angle Valve KF40/NW40 180°
VAT 26430-QA21-ADR1
VAT HV Gate Valve 14040-PE34
MKS 153D-3-80-2 Throttle Valve(Butterfly Valve ) Repair
MKS 253B-1-40-1 Throttle Valve (Butterfly Valve ) Repair
INFICON VBP 160 (253-151) Throttle Valve(Butterfly Valve ) Repair
MKS 253BX-13964 Throttle Valve (Butterfly Valve ) Repair
MKS 253B-31771 Throttle Valve(Butterfly Valve ) Repair
kurt Slite door Valve V77-D571-3-AACE2BA
Oerlikon LEYCON Valves DN100